Input protection circuit preventing electrostatic discharge damage of semiconductor integrated circuit

ABSTRACT

An input protection circuit comprises a semiconductor chip, an internal circuit disposed on the semiconductor chip, a first input/output terminal which is disposed on the semiconductor chip and connected to the internal circuit, a second input/output terminal which is disposed on the semiconductor chip, connected to the internal circuit and disposed at a position adjacent to the first input/output terminal, and a fusing part which is disposed on the semiconductor chip and connected between the first and second input/output terminals.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of Ser. No. 10/702,488,filed Nov. 7, 2003 and is based upon and claims the benefit of priorityfrom the prior Japanese Patent Application No. 2003-113179, filed onApr. 17, 2003; the entire contents of which are incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an input protection circuit, moreparticularly to an input protection circuit preventing electrostaticdischarge damage of a semiconductor integrated circuit.

2. Description of the Related Art

A semiconductor integrated circuit has gate input circuits, such asfield effect transistors, as input/output terminals. The gate inputcircuits connected to the input/output terminals are sometimes destroyedby electrostatic discharge (ESD) from the human body or various devices.Particularly, due to the ESD applied between the input/output terminalsbefore mounting semiconductor integrated circuits on a circuit board orthe like, gates of a field effect transistor used for an input circuitare sometimes destroyed.

As a measure to solve the above problem, disclosed is an inputprotection circuit in which voltage levels of input/output terminals donot exceed a supply voltage because of diodes (hereinafter referred toas “the first conventional technology”). The input protection circuitaccording to the first conventional technology includes a diode havingits cathode terminal connected to a power source and its anode terminalconnected to an input/output terminal and a diode having its cathodeterminal connected to the ground and its anode terminal connected to theinput/output terminal. According to the first conventional technology,when the ESD is applied to the input/output terminal, a current path tothe power source or the ground is created by diode forward conduction orreverse breakdown. Thus, application of a high voltage to internalelements of a semiconductor integrated circuit can be prevented.

Moreover, disclosed is an input protection circuit in which fuses areprovided between input/output terminals and diodes (hereinafter referredto as “the second conventional technology”). In the input protectioncircuit according to the second conventional technology, when a directcurrent is applied to a fuse after a semiconductor integrated circuit ismounted, the fuse is blown out. When the fuse is blown out, the inputprotection circuit is separated from the input/output terminals. Thus,the input protection circuit is not affected by a parasitic capacitancethat the diodes have. When there is no influence of the parasiticcapacitance of the diodes, a high-speed transmission of an input signalis not impaired.

However, a junction area of the diodes of the input protection circuitaccording to the first conventional technology is designed to be aboutseveral square micrometers in order to instantly apply a large amount ofcharges associated with high-voltage electrostatic discharge. In thiscase, a junction capacitance of the diodes sometimes reaches several pF.There was a problem that attenuation of a signal level and a propagationdelay of a signal occur due to a parasitic capacitance of the diodes andthe like.

Moreover, the input protection circuit according to the secondconventional technology has the diode in a cell. Thus, there was aproblem that the diode in the cell causes an increase in an area of asemiconductor integrated circuit.

SUMMARY OF THE INVENTION

In a first aspect of the present invention, an input protection circuitcomprises a semiconductor chip, an internal circuit disposed on thesemiconductor chip, a first input/output terminal which is disposed onthe semiconductor chip and connected to the internal circuit, a secondinput/output terminal which is disposed on the semiconductor chip,connected to the internal circuit and disposed at a position adjacent tothe first input/output terminal, and a fusing part which is disposed onthe semiconductor chip and connected between the first and secondinput/output terminals.

In a second aspect of the present invention, an input protection circuitcomprises a semiconductor chip, an internal circuit disposed on thesemiconductor chip, a plurality of input/output terminals which aredisposed on the semiconductor chip and connected to the internalcircuit, and a plurality of fusing parts which are disposed on thesemiconductor chip and disposed between input/output terminals adjacentto each other among the plurality of input/output terminals.

In a third aspect of the present invention, an input protection circuitcomprises, a semiconductor chip, an internal circuit disposed on thesemiconductor chip, a plurality of terminal groups which are disposed onthe semiconductor chip, are connected to the internal circuit and have aplurality of input/output terminals, an electrical wiring which isdisposed on the semiconductor chip and connects the plurality ofterminal groups to each other, and a plurality of fusing parts which aredisposed on the semiconductor chip and respectively disposed betweeninput/output terminals adjacent to each other among the plurality ofinput/output terminals.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a view explaining an input protection circuit according to afirst embodiment of the present invention.

FIG. 2 is a view explaining a fusing part of the input protectioncircuit according to the first embodiment of the present invention.

FIGS. 3A and 3B are views explaining internal circuits of the inputprotection circuit according to the first embodiment of the presentinvention.

FIG. 4 is a view explaining an input protection circuit according to asecond embodiment of the present invention.

FIG. 5 is a view explaining a current path when ESD is applied to theinput protection circuit according to the second embodiment of thepresent invention.

FIG. 6 is a view explaining an input protection circuit according to athird embodiment of the present invention.

FIG. 7 is a view explaining a current path when ESD is applied to theinput protection circuit according to the third embodiment of thepresent invention.

FIG. 8 is a view explaining the input protection circuit according tothe third embodiment of the present invention.

FIG. 9 is a view explaining an input protection circuit according to afourth embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Various embodiments of the present invention will be described withreference to the accompanying drawings. It is to be noted that the sameor similar reference numerals are applied to the same or similar partsand elements throughout the drawings, and the description of the same orsimilar parts and elements will be omitted or simplified.

In the following descriptions, numerous specific details are set fourthsuch as specific signal values, etc. to provide a thorough understandingof the present invention. However, it will be obvious to those skilledin the art that the present invention may be practiced without suchspecific details. In other instances, well-known circuits have beenshown in block diagram form in order not to obscure the presentinvention in unnecessary detail.

FIRST EMBODIMENT

As shown in FIG. 1, an input protection circuit according to a firstembodiment of the present invention includes: a semiconductor chip 1; aninternal circuit 2 disposed on the semiconductor chip 1; a firstinput/output terminal 3 which is disposed on the semiconductor chip 1and connected to the internal circuit 2; a second input/output terminal4 disposed at a position adjacent to the first input/output terminal 3on the semiconductor chip 1; and a fusing part 5 connected between thefirst and second input/output terminals 3 and 4 on the semiconductorchip 1. The fusing part 5 includes a fuse F1 connected between the firstand second input/output terminals 3 and 4. The fuse F1 is blown out whena fusion setting current is applied between the first and secondinput/output terminals 3 and 4. For the fuse F1, as shown in FIG. 2,used is a part of a rectangular piece of a metal wiring disposed on thesemiconductor chip 1, the part having the smallest cross-sectional area.As the metal wiring, it is considered to use, for example, an aluminumfilm, a polysilicon film and the like.

As shown in FIG. 3A, the first input/output terminal 3 is connected, forexample, to a gate terminal of a field effect transistor Q1 in theinternal circuit 2. Alternatively, as shown in FIG. 3B, the firstinput/output terminal 3 is connected, for example, to a source terminal(or a drain terminal) of a field effect transistor Q2 in the internalcircuit 2. Similarly to the first input/output terminal 3 shown in FIGS.3A and 3B, the second input/output terminal 4 is connected to any ofgate, source, and drain terminals of a field effect transistor in theinternal circuit 2.

With reference to FIG. 1, description will be given concerning anoperation before blowout of the fusing part 5 in the input protectioncircuit according to the first embodiment. Here, the description is withregard to gate oxide film breakdown inside a semiconductor integratedcircuit due to application of electrostatic discharge (ESD) during stepsof fabricating the semiconductor integrated circuit. The gate oxide filmbreakdown inside the semiconductor integrated circuit due to the ESDoccurs most frequently in the steps of assembling, selecting, packingand board mounting. On the contrary, after mounting the semiconductorintegrated circuit on a circuit board, input/output terminals becomeless likely to be affected by static electricity directly from theoutside. In other words, the semiconductor integrated circuit needs tobe protected before being mounted on the circuit board.

When the ESD is applied between the first and second input/outputterminals 3 and 4 before blowout of the fusing part 5, the ESD isapplied to the fuse F1. In other words, the ESD is outputted from thefirst input/output terminal 3 to the second input/output terminal 4 viathe fuse F1. Thus, the gate oxide film breakdown inside thesemiconductor integrated circuit connected to the input/output terminalsdoes not occur. Note that a current generated by the ESD is weak andthus the fuse F1 is not blown out.

After mounting the semiconductor integrated circuit on the circuitboard, a fusion setting current is applied between the first and secondinput/output terminals 3 and 4 of the semiconductor integrated circuit,the fuse F1 is blown out and the first and second input/output terminalsare electrically separated from each other. Fusing conditions for thefuse F1 are determined based on the material and cross-sectional area ofthe metal wiring.

According to the input protection circuit of the first embodiment, thegate oxide film breakdown due to the ESD can be suppressed in the stepsbefore the mounting. Moreover, after the mounting, the fuse F1 is blownout and an element having a capacitance component is not connected tothe first and second input/output terminals 3 and 4. Thus,miniaturization becomes possible without causing attenuation of a signallevel of an input/output signal from the first and second input/outputterminals 3 and 4 or a propagation delay of the input/output signal.

SECOND EMBODIMENT

As shown in FIG. 4, an input protection circuit according to a secondembodiment of the present invention includes a plurality of input/outputterminals 11 a to 11 i, 12 a to 12 i, 13 a to 13 i and 14 a to 14 i on asemiconductor chip 1. It was described that, in the input protectioncircuit shown in FIG. 1, the fusing part is provided between the twoterminals, which are the first and second input/output terminals 3 and4. However, in the input protection circuit shown in FIG. 4, theplurality of input/output terminals 11 a to 11 i, 12 a to 12 i, 13 a to13 i and 14 a to 14 i, which are adjacent to each other, arerespectively connected to each other by a plurality of fusing parts 21 ato 21 i, 22 a to 22 i, 23 a to 23 i and 24 a to 24 i. For example, theinput/output terminal 11 a is connected to the input/output terminal 11b by the fusing part 21 a. Note that the plurality of input/outputterminals 11 a to 11 i, 12 a to 12 i, 13 a to 13 i and 14 a to 14 i areconnected to an internal circuit 2, respectively. For example, fuses areused as the plurality of fusing parts 21 a to 21 i, 22 a to 22 i, 23 ato 23 i and 24 a to 24 i. The rest of the structure is virtually thesame as that of the first embodiment and thus repetitive descriptionwill be omitted.

With reference to FIG. 5, description will be given concerning anoperation of the input protection circuit according to the secondembodiment. It is assumed that, before blowout of the fusing parts 21 ato 21 i, 22 a to 22 i, 23 a to 23 i and 24 a to 24 i, ESD is appliedbetween the input/output terminals 11 a and 12 i. The ESD inputted fromthe input/output terminal 11 a is outputted from the input/outputterminal 12 i through a current path 15. The ESD is applied to thefusing parts 21 a to 21 i and 22 a to 22 i. In other words, the ESD isoutputted from the input/output terminal 11 a to the input/outputterminal 12 i via the fusing parts 21 a to 21 i and 22 a to 22 i. Thus,the gate oxide film breakdown inside the semiconductor integratedcircuit connected to the input/output terminals does not occur. Notethat a current generated by the ESD is weak and thus the fusing parts 21a to 21 i and 22 a to 22 i are not blown out.

After mounting the semiconductor integrated circuit on a circuit board,a fusion setting current is applied between the input/output terminalsadjacent to each other. These terminals are among the plurality ofinput/output terminals 11 a to 11 i, 12 a to 12 i, 13 a to 13 i and 14 ato 14 i disposed on the semiconductor chip 1 so as to be adjacent toeach other. Then the fusing parts 21 a to 21 i, 22 a to 22 i, 23 a to 23i and 24 a to 24 i are blown out to electrically separate each of theplurality of input/output terminals 11 a to 11 i, 12 a to 12 i, 13 a to13 i and 14 a to 14 i from each other. Fusing conditions for the fusingparts 21 a to 21 i, 22 a to 22 i, 23 a to 23 i and 24 a to 24 i aredetermined based on a material and cross-sectional area of a metalwiring used as the fuses.

According to the input protection circuit of the second embodiment, thegate oxide film breakdown due to the ESD can be suppressed in the stepsbefore the mounting. Moreover, after the mounting, the fusing parts areblown out and an element having a capacitance component is not connectedto the plurality of input/output terminals 11 a to 11 i, 12 a to 12 i,13 a to 13 i and 14 a to 14 i. Thus, miniaturization becomes possiblewithout causing attenuation of a signal level of an input/output signalfrom the input/output terminals 11 a to 11 i, 12 a to 12 i, 13 a to 13 iand 14 a to 14 i, or a propagation delay of the input/output signal.

THIRD EMBODIMENT

As shown in FIG. 6, an input protection circuit according to a thirdembodiment of the present invention includes: a semiconductor chip 1; aninternal circuit 2 disposed on the semiconductor chip 1; a plurality ofterminal groups 31 to 34 disposed on the semiconductor chip 1 andconnected to the internal circuit 2; and an electrical wiring 25 whichis disposed on the semiconductor chip 1 and connects the plurality ofterminal groups 31 to 34 to each other. The first terminal group 31includes: a plurality of input/output terminals 31 a to 31 i; and fusingparts 41 a to 41 h respectively disposed between the input/outputterminals adjacent to each other, which are among the plurality ofinput/output terminals 31 a to 31 i. The second terminal group 32includes: a plurality of input/output terminals 32 a to 32 i; and fusingparts 42 a to 42 h respectively disposed between the input/outputterminals adjacent to each other, which are among the plurality ofinput/output terminals 32 a to 32 i. The third terminal group 33includes: a plurality of input/output terminals 33 a to 33 i; and fusingparts 43 a to 43 h respectively disposed between the input/outputterminals adjacent to each other, which are among the plurality ofinput/output terminals 33 a to 33 i. The fourth terminal group 34includes: a plurality of input/output terminals 34 a to 34 i; and fusingparts 44 a to 44 h respectively disposed between the input/outputterminals adjacent to each other, which area among the plurality ofinput/output terminals 34 a to 34 i. Here, the input/output terminal 31e is connected to the input/output terminals 32 e, 33 e and 34 e by theloop-shaped electrical wiring 25 on the semiconductor chip 1.

With reference to FIG. 7, an operation of the input protection circuitaccording to the third embodiment will be described. It is assumed that,before blowout of the fusing parts 41 a to 41 h, 42 a to 42 h, 43 a to43 h and 44 a to 44 h, ESD is applied between the input/output terminals31 a and 32 i. Specifically, the ESD inputted from the input/outputterminal 31 a is outputted from the input/output terminal 32 i through acurrent path 35. Thus, the gate oxide film breakdown inside thesemiconductor integrated circuit connected to the input/output terminalsdoes not occur. Note that a current generated by the ESD is weak andthus the fusing parts 41 a to 41 d and 42 e to 42 h are not blown out.

After mounting the semiconductor integrated circuit on a circuit board,a fusion setting current is applied between the input/output terminalsadjacent to each other. These terminals are among the plurality ofinput/output terminals 31 a to 31 i, 32 a to 32 i, 33 a to 33 i and 34 ato 34 i disposed on the semiconductor chip 1 so as to be adjacent toeach other. Then, the fusing parts 41 a to 41 h, 42 a to 42 h, 43 a to43 h and 44 a to 44 h are blown out to electrically separate each of theplurality of input/output terminals 31 a to 31 i, 32 a to 32 i, 33 a to33 i and 34 a to 34 i from each other. Fusing conditions for the fusingparts 41 a to 41 h, 42 a to 42 h, 43 a to 43 h and 44 a to 44 h aredetermined based on a material and cross-sectional area of a metalwiring used as the fuses.

The electrical wiring 25 of the input protection circuit shown in FIG. 6is represented by a loop-shaped wiring disposed on the semiconductorchip 1. However, the electrical wiring 25 does not need to have a loopshape as long as the plurality of terminal groups 31 to 34 are connectedto each other. Moreover, as shown in FIG. 8, besides the electricalwiring 25, the input protection circuit may further include anelectrical wiring 26 which connects the plurality of terminal groups 31to 34 to each other. By providing a plural number of electrical wirings,safety upon application of the ESD is enhanced.

According to the input protection circuit of the third embodiment, thegate oxide film breakdown due to the ESD can be suppressed in the stepsbefore the mounting. Moreover, after the mounting, the fusing parts areblown out and an element having a capacitance component is not connectedto the plurality of input/output terminals 31 a to 31 i, 32 a to 32 i,33 a to 33 i and 34 a to 34 i. Thus, miniaturization becomes possiblewithout causing attenuation of a signal level of an input/output signalfrom the input/output terminals 31 a to 31 i, 32 a to 32 i, 33 a to 33 iand 34 a to 34 i or a propagation delay of the input/output signal.

FOURTH EMBODIMENT

As shown in FIG. 9, an input protection circuit according to a fourthembodiment of the present invention further includes a series circuitincluding an antifuse AF and a fuse F2 for a second blowout in parallelwith the fuse F1 used for the fusing part 5 of the input protectioncircuit shown in FIG. 1. The input protection circuits described in thefirst to third embodiments have a structure in which no voltage isapplied to the internal circuit 2. Thus, before the blowout of thefusing part 5 of the input protection circuit, no voltage or signal canbe applied to the internal circuit 2. Since characteristic evaluationcannot be performed in a chip state, the input protection circuitsdescribed in the first to third embodiments evaluate the operation ofthe internal circuit 2 by wafer die sort before the fuse F1 is formed.On the contrary, the input protection circuit according to the fourthembodiment can perform the characteristic evaluation in the chip statebefore shipping.

With reference to FIG. 9, description will be given concerning anoperation before blowout of the fusing part 5 of the input protectioncircuit according to the fourth embodiment of the present invention. Theinternal circuit 2 in a state of a chip formed on a wafer is protectedby the fuse F1.

Before the blowout of the fusing part 5, ESD is applied between thefirst and second input/output terminals 3 and 4. Specifically, the ESDis applied to the fuse F1 via the first input/output terminal 3. Thus,the gate oxide film breakdown inside the semiconductor integratedcircuit connected to the input/output terminals does not occur. Notethat a current generated by the ESD is weak and thus the fuse F1 is notblown out.

In order to confirm the operation of the internal circuit 2, aftermounting the semiconductor integrated circuit on a test board, the fuseF1 is blown out by applying a fusion setting current between the firstand second input/output terminals 3 and 4 of the semiconductorintegrated circuit. Then the first and second input/output terminals 3and 4 are electrically separated from each other to release a protectionstate temporarily. The fusing conditions for the fuse F1 are determinedbased on the material and cross-sectional area of the metal wiring. Theinternal circuit 2 mounted on the semiconductor integrated circuit isevaluated whether or not the operations thereof conform to aspecification that should be checked before shipment of a product. Afterthe evaluation is finished, the antifuse AF becomes electricallyconductive when a conducting setting voltage is applied thereto. Whenthe antifuse AF becomes conductive, the first and second input/outputterminals 3 and 4 are connected to each other by the fuse F2, thusreturning to the protection state. After the antifuse becomesconductive, the chip-state semiconductor integrated circuit is detachedfrom an evaluation board.

The semiconductor integrated circuit detached from the evaluation boardis mounted on a circuit board after shipment. The fuse F2 for a secondblowout of the semiconductor integrated circuit mounted on the circuitboard is blown out when the fusion setting current is applied betweenthe first and second input/output terminals 3 and 4.

According to the input protection circuit of the fourth embodiment, thegate oxide film breakdown due to the ESD can be suppressed in the stepsbefore the mounting. Moreover, after the mounting, the fusing part isblown out and an element having a capacitance component is not connectedto the first and second input/output terminals 3 and 4. Thus,miniaturization becomes possible without causing attenuation of a signallevel of an input/output signal from the first and second input/outputterminals 3 and 4 or a propagation delay of the input/output signal.Furthermore, a voltage is applied to the antifuse AF and theinput/output terminals are connected to each other again and protectedby the fuse F2. Thus, even after the operation evaluation of theinternal circuit 2, the internal circuit 2 can be protected again.

OTHER EMBODIMENT

Although the present invention is described according to the first tofourth embodiments as described thus far, it should be understood thatthose descriptions and drawings constituting a part of the presentdisclosure do not limit the present invention. From the presentdisclosure, various alternative embodiments, embodiments and operationaltechnologies will become apparent to those skilled in the art.

According to the descriptions of the foregoing second and thirdembodiments, the fuse connect each of the input/output terminals.However, it is possible to use the fusing part 5 including the antifuseAF as described in the fourth embodiment.

Various modifications will become possible for those skilled in the artafter receiving the teachings of the present disclosure withoutdeparting from the scope thereof.

1. An intermediate product for a semiconductor integrated circuit havingan input protection circuit, before being mounted on a circuit board,the input protection circuit comprising: a semiconductor chip; aninternal circuit disposed on the semiconductor chip: a plurality ofinput/output terminals linearly arranged on the semiconductor chip andconnected respectively to the internal circuit; and a plurality offusing parts disposed on the semiconductor chip and disposed alternatelybetween input/output terminals adjacent to each other among theplurality of input/output terminals so as to connect serially theplurality of input/output terminals, forming a current path by anarrangement of the plurality of input/output terminals and the pluralityof fusing parts, wherein the plurality of fusing parts are respectivelyconfigured to be blown out so that the plurality of input/outputterminals are electrically separated respectively from each other afterthe intermediate product is mounted on the circuit board.
 2. Theintermediate product according to claim 1, wherein each of the fusingparts includes a first fuse connected between input/output terminalsadjacent to each other among the plurality of input/output terminals. 3.The intermediate product according to claim 1, wherein the plurality ofinput/output terminals are arranged in a peripheral region of thesemiconductor chip.
 4. The intermediate product according to claim 1,wherein the arrangement of the plurality of input/output terminals andthe plurality of fusing parts implements a closed loop.
 5. An inputprotection circuit comprising: a semiconductor chip; an internal circuitdisposed on the semiconductor chip: a plurality of input/outputterminals which are disposed on the semiconductor chip and connected tothe internal circuit; and a plurality of fusing parts which are disposedon the semiconductor chip and disposed between input/output terminalsadjacent to each other among the plurality of input/output terminals,wherein each of the fusing parts includes a first fuse, an antifuse anda second fuse, which are serially connected between input/outputterminals adjacent to each other among the plurality of input/outputterminals.
 6. The input protection circuit according to claim 5, whereinthe antifuse becomes conductive when a conduction setting voltage isrespectively applied between input/output terminals adjacent to eachother among the plurality of input/output terminals.
 7. The inputprotection circuit according to claim 5, wherein the second fuse for asecond blowout is blown out when a fusion setting current is furtherapplied, respectively, between input/output terminals adjacent to eachother among the plurality of input/output terminals, after the antifusebecomes conductive.